CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPITAXIAL DEPOSITION OPERATIONS

• Main Author: PATIL, Aniketnitin
• Format: Patent
• Language: English; French
• Published: 02.05.2024
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CRYSTAL GROWTH; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SEMICONDUCTOR DEVICES; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

A cassette support system is disclosed and includes in one embodiment, a pedestal assembly, with a shaft, a plurality of arms coupled to the shaft and extending radially from the shaft, wherein at least two radially adjacent arms included in the plurality of arms are separated by an angle of about 130 degrees or greater, a plurality of cassette supporting arms, with each cassette supporting arm extending from an end of an arm included in the plurality of arms, and one or more substrate support rings, wherein each substrate support ring includes a ridge defined along an inner circumference of the substrate support ring where the ridge configured to receive a substrate. La présente invention concerne, selon un mode de réalisation, un système de support de cassette comprenant un ensemble socle, avec un arbre, une pluralité de bras accouplés à l'arbre et s'étendant radialement à partir de l'arbre, au moins deux bras radialement adjacents inclus dans la pluralité de bras étant séparés par un angle supérieur ou égal à environ 130 degrés, une pluralité de bras de support de cassette, chaque bras de support de cassette s'étendant à partir d'une extrémité d'un bras inclus dans la pluralité de bras, et une ou plusieurs bagues de support de substrat, chaque bague de support de substrat comprenant une arête formée le long d'une circonférence interne de la bague de support de substrat, l'arête étant configurée pour recevoir un substrat.