GATE VALVE, AND METHOD FOR FASTENING SEALING PLATE

• Main Author: KIM, Sun Bin
• Format: Patent
• Language: English; French; Korean
• Published: 02.05.2024
• Subjects: ACTUATING-FLOATS; BASIC ELECTRIC ELEMENTS; BLASTING; COCKS; DEVICES FOR VENTING OR AERATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MECHANICAL ENGINEERING; SEMICONDUCTOR DEVICES; TAPS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

The present invention relates to a gate valve, and a method for fastening a sealing plate. The gate valve according to one embodiment of the present invention has a structure enabling convenient replacement if sealing, which is a consumable material, requires replacement. In addition, rubbing of the sealing can be reduced and the replacement cycle (life extension) of the sealing can be increased. Furthermore, a transfer chamber and other process chambers can remain in operation during maintenance for replacing a sealing plate. In one embodiment of the present invention, a fixed block and a sealing plate are provided in a gate valve of a semiconductor manufacturing device so as to form a gate plate coupled to a valve rod. La présente invention concerne un robinet-vanne, et un procédé de fixation d'une plaque d'étanchéité. Le robinet-vanne selon un mode de réalisation de la présente invention a une structure permettant un remplacement pratique si le matériau d'étanchéité, qui est un matériau consommable, nécessite un remplacement. De plus, le frottement du matériau d'étanchéité peut être réduit et le cycle de remplacement (extension de durée de vie) du matériau d'étanchéité peut être augmenté. En outre, une chambre de transfert et d'autres chambres de traitement peuvent rester en fonctionnement pendant la maintenance pour remplacer une plaque d'étanchéité. Dans un mode de réalisation de la présente invention, un bloc fixe et une plaque d'étanchéité sont disposés dans un robinet-vanne d'un dispositif de fabrication de semi-conducteur de façon à former une plaque de grille couplée à une tige de vanne. 본 발명은 게이트 밸브 및 씰링 플레이트 체결 방법에 관한 것이다. 본 발명의 실시 예에 따른 게이트 밸브는, 소모성 재료인 씰링의 교체가 필요한 경우 편리하게 교체할 수 있는 구조를 갖는다. 또한, 씰링이 쓸리는 것(rubbing)이 감소될 수 있고, 씰링의 교체 주기(수명 연장)를 늘릴 수 있다. 나아가, 씰링 플레이트를 교체하는 메인터넌스 하는 중에 트랜스퍼 챔버와 다른 프로세스 챔버는 가동을 유지할 수 있다. 본 발명의 실시 예는, 반도체 제조 장치의 게이트 밸브에 제공되어, 밸브 로드와 결합되는 게이트 플레이트의 구성으로, 고정 블록과 씰링 플레이트를 포함한다.