METHOD FOR MANUFACTURING MEMBER HAVING GAS FLOWPATH, AND MEMBER HAVING GAS FLOWPATH

• Main Authors: TERADA Hiroto, SATO Rintaro, OKURA Shigeyuki, SHIONO Kai, TORIYA Daisuke, YAMANAKA Hajime
• Format: Patent
• Language: English; French; Japanese
• Published: 02.05.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

This method for manufacturing a member having a gas flowpath includes: preparing a metal material inside of which a gas flowpath has been formed; and forming an anti-corrosion film on the inner surface of the gas flowpath using atomic layer deposition (ALD). Aluminum, an aluminum alloy, or the like can be used as the metal material. An alumina film or the like can be used as the anti-corrosion film. Ce procédé de fabrication d'un élément comportant une voie de circulation gazeuse comprend : la préparation d'un matériau métallique à l'intérieur duquel une voie de circulation gazeuse a été formé ; et la formation d'un film anti-corrosion sur la surface interne de la voie de circulation gazeuse par dépôt de couche atomique (ALD). De l'aluminium, un alliage d'aluminium ou similaire peut être utilisé en tant que matériau métallique. Un film d'alumine ou similaire peut être utilisé en tant que film anticorrosion. ガス流路を有する部材の製造方法は、内部にガス流路が形成された金属素材を準備することと、ＡＬＤによりガス流路の内面に耐食性膜を形成することとを有する。金属素材として例えばアルミニウムまたはアルミニウム合金を用いることができ、耐食性膜として例えば酸化アルミニウム膜を用いることができる。