LAMP AND WINDOW CONFIGURATIONS FOR SUBSTRATE PROCESSING CHAMBERS

• Main Authors: DHAMODHARAN, Raja Murali, SUBBARAMAN, Venkateswaran
• Format: Patent
• Language: English; French
• Published: 11.04.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present disclosure relates to heat sources (e.g., lamps) and windows for processing chambers, and related methods. In one or more embodiments, a lamp applicable for use in semiconductor manufacturing includes a bulb tube extending along at least a segment of an arcuate profile. The bulb tube defines an arcuate central opening, The lamp includes a filament positioned in the arcuate central opening, The filament extends along at least the segment of the arcuate profile. The lamp includes a reflective coating formed on a first portion of an outer face of the bulb tube. La présente invention concerne des sources de chaleur (par exemple, des lampes) et des fenêtres pour des chambres de traitement, ainsi que des procédés associés. Dans un ou plusieurs modes de réalisation, une lampe applicable pour une utilisation dans la fabrication de semi-conducteurs comprend un tube d'ampoule s'étendant le long d'au moins un segment d'un profil arqué. Le tube d'ampoule définit une ouverture centrale arquée, la lampe comprend un filament positionné dans l'ouverture centrale arquée, le filament s'étend le long d'au moins le segment du profil arqué. La lampe comprend un revêtement réfléchissant formé sur une première partie d'une face externe du tube d'ampoule.