WIRELESS DATA COMMUNICATION IN PLASMA PROCESS CHAMBER THROUGH VI SENSOR AND RF GENERATOR

Embodiments disclosed herein include a diagnostic substrate. In an embodiment, the diagnostic substrate comprises a substrate and a sensor on the substrate. In an embodiment, the diagnostic substrate further comprises a communication module on the substrate that is communicatively coupled to the sen...

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Bibliographic Details
Main Author LIN, Chuang-chia
Format Patent
LanguageEnglish
French
Published 04.04.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Embodiments disclosed herein include a diagnostic substrate. In an embodiment, the diagnostic substrate comprises a substrate and a sensor on the substrate. In an embodiment, the diagnostic substrate further comprises a communication module on the substrate that is communicatively coupled to the sensor. In an embodiment, the communication module comprises an output antenna, a switch coupled to the output antenna, and a signal source coupled to the switch. Des modes de réalisation de la présente invention comprennent un substrat de diagnostic. Dans un mode de réalisation, le substrat de diagnostic comprend un substrat et un capteur sur le substrat. Dans un mode de réalisation, le substrat de diagnostic comprend en outre un module de communication sur le substrat qui est en liaison de communication avec le capteur. Dans un mode de réalisation, le module de communication comprend une antenne de sortie, un commutateur relié à l'antenne de sortie, et une source de signal reliée au commutateur.
Bibliography:Application Number: WO2023US31566