MASK ASSEMBLY AND METHOD FOR MANUFACTURING SAME

• Main Authors: KWAK, Byung-heon, KIM, Kyungmin, HUR, Jun-gyu, PARK, Jong-kab
• Format: Patent
• Language: English; French; Korean
• Published: 28.03.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A mask assembly, which is used in thin film processing, may comprise: a metal sheet including a grid-shaped frame area and a plurality of opening forming areas disposed inside the grid and each having a plurality of openings formed therein; and a mask frame installed corresponding to the frame area at both ends of the metal sheet, wherein the thickness of the frame area may be greater than that of the opening forming areas, and in the thickness direction of the metal sheet, a neutral plane of the metal sheet may be located inside the opening forming areas or between a position that is 50% of the thickness of the metal sheet and the surface of the opening forming areas. Ensemble masque, qui est utilisé dans un traitement de film mince, pouvant comprendre : une feuille métallique comprenant une zone de cadre en forme de grille et une pluralité de zones de formation d'ouverture disposées à l'intérieur de la grille et présentant chacune une pluralité d'ouvertures formées à l'intérieur de celle-ci ; et un cadre de masque installé en correspondance avec la zone de cadre aux deux extrémités de la feuille métallique, l'épaisseur de la zone de cadre pouvant être supérieure à celle des zones de formation d'ouverture, et dans la direction d'épaisseur de la feuille métallique, un plan neutre de la feuille métallique peut être situé à l'intérieur des zones de formation d'ouverture ou entre une position qui fait 50 % de l'épaisseur de la feuille métallique et la surface des zones de formation d'ouverture. 마스크 어셈블리는 박막 공정에 사용되는 마스크 어셈블리에 있어서, 격자 형상의 프레임 영역과, 격자의 내부에 배치되고 각각에 복수의 개구부가 형성되는 복수의 개구 형성 영역을 포함하는 금속 시트; 및 상기 금속 시트 양단의 상기 프레임 영역에 대응하여 설치되는 마스크 프레임을 포함하며, 상기 프레임 영역의 두께는 상기 개구 형성 영역의 두께보다 크며, 상기 금속 시트의 두께 방향에서, 상기 금속 시트의 중립면(neutral plane)은 상기 개구 형성 영역 내부 또는 상기 금속 시트 두께의 50%인 위치와 상기 개구 형성 영역의 표면 사이에 위치할 수 있다.