OPTICAL DEVICE, OPTICAL MACHINING DEVICE, MICROSCOPE DEVICE, AND SCANNING METHOD

• Main Author: TOKUHISA, Akira
• Format: Patent
• Language: English; French; Japanese
• Published: 21.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; DEVICES USING STIMULATED EMISSION; ELECTRICITY; FREQUENCY-CHANGING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SOLDERING OR UNSOLDERING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORTING; WELDING; WORKING BY LASER BEAM

An optical device (10) of an optical machining device (1) includes: an optical fiber amplifier that amplifies pulsed light; a diffraction grating (12) that disperses, by a diffraction phenomenon, pulsed light (PL) output from the optical fiber amplifier; a collimator lens (13) that collimates the pulsed light (PL) scattered at the diffraction grating (12); and an objective lens (17) that condenses the pulsed light (PL) transmitted through the collimator lens (13). By changing the amplification rate of the optical fiber amplifier, the position at which time focus occurs is changed in the optical axis direction of the objective lens (17). L'invention concerne un dispositif optique (10) d'un dispositif d'usinage optique (1) comprenant : un amplificateur à fibre optique qui amplifie la lumière pulsée ; un réseau de diffraction (12) qui disperse, par un phénomène de diffraction, une lumière pulsée (PL) émise par l'amplificateur à fibre optique ; une lentille de collimateur (13) qui collimate la lumière pulsée (PL) diffusée au niveau du réseau de diffraction (12) ; et une lentille d'objectif (17) qui condense la lumière pulsée (PL) transmise à travers la lentille de collimateur (13). En changeant le taux d'amplification de l'amplificateur à fibre optique, la position à laquelle la mise au point dans le temps se produit est modifiée dans la direction de l'axe optique de la lentille d'objectif (17). 光加工装置（１）の光学装置（１０）が、パルス光を増幅する光ファイバ増幅器と、光ファイバ増幅器から出力されたパルス光（ＰＬ）を回折現象により分散させる回折格子（１２）と、回折格子（１２）において分散したパルス光（ＰＬ）を平行にするコリメータレンズ（１３）と、コリメータレンズ（１３）を透過したパルス光（ＰＬ）を集光する対物レンズ（１７）とを有し、光ファイバ増幅器の増幅率を変更することにより、時間フォーカスが生じる位置を対物レンズ（１７）の光軸方向に変化させる。