METHOD OF REGENERATING CRYOPUMP

• Main Authors: YANG, Won Kyun, KIM, Young Bae, AHN, Kyung Joon, CHOI, Ki Chul
• Format: Patent
• Language: English; French; Korean
• Published: 14.03.2024
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; WEAPONS

The method of regenerating a cryopump comprising: a freezer having a first stage unit and a second stage unit, and cooling the first stage unit and the second stage unit by using a high-pressure refrigerant; a cryopanel including a first stage panel cooled by the first stage unit, and a second stage...