THREE-DIMENSIONAL NANOPLASMONIC CAVITY SUBSTRATE, AND MANUFACTURING METHOD THEREOF

• Main Authors: LEE, Sung Woon, MUN, Chae Won, JUNG, Sung Hoon, PARK, Sung Gyu, BYEON, Eun Yeon, LEE, Seung Hoon
• Format: Patent
• Language: English; French; Korean
• Published: 14.03.2024
• Subjects: COLORIMETRY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEASURING; NANOTECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; RADIATION PYROMETRY; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TESTING; TRANSPORTING

The present invention provides a three-dimensional nanoplasmonic cavity substrate comprising: a plasmonic substrate in which a plasmonic metal nanodimple layer having a plurality of nanodimples formed therein is stacked on top of a base substrate; and plasmonic metal nanoparticles inserted into the nanodimples. La présente invention concerne un substrat de cavité nanoplasmonique tridimensionnel comprenant : un substrat plasmonique comportant une couche de nanoalvéoles métalliques plasmoniques, dans laquelle est formée une pluralité de nanoalvéoles, empilé sur un substrat de base ; et des nanoparticules métalliques plasmoniques insérées dans les nanoalvéoles. 본 발명은 베이스 기판의 상부에 복수의 나노 딤플이 형성된 플라즈모닉 금속 나노 딤플 층이 적층된 플라즈모닉 기판; 및 상기 나노 딤플의 내부에 삽입된 플라즈모닉 금속 나노입자를 포함하여 구성되는 것을 특징으로 하는 3차원 나노 플라즈모닉 캐비티 기판을 제공한다.