VIBRATION DEVICE

This vibration device comprises a first substrate, a second substrate, an intermediate layer, and an excitation electrode. The first substrate has a first surface. The second substrate has a second surface facing the first surface. The intermediate layer is located between the first surface and the...

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Bibliographic Details
Main Authors KAWAGUCHI, Yoshiyuki, AONO, Shigeo
Format Patent
LanguageEnglish
French
Japanese
Published 07.03.2024
Subjects
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