VIBRATION DEVICE
This vibration device comprises a first substrate, a second substrate, an intermediate layer, and an excitation electrode. The first substrate has a first surface. The second substrate has a second surface facing the first surface. The intermediate layer is located between the first surface and the...
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Main Authors | , |
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Format | Patent |
Language | English French Japanese |
Published |
07.03.2024
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Subjects | |
Online Access | Get full text |
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