SUBSTRATE PROCESSING DEVICE AND CONVEYANCE TEACHING METHOD
The present invention enables teaching to be executed without introducing a teaching substrate from outside of a substrate processing device. A substrate processing device according to the present invention includes a processing chamber, a conveying robot that conveys a substrate that is an object o...
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Main Authors | , , , , |
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Format | Patent |
Language | English French Japanese |
Published |
04.01.2024
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention enables teaching to be executed without introducing a teaching substrate from outside of a substrate processing device. A substrate processing device according to the present invention includes a processing chamber, a conveying robot that conveys a substrate that is an object of processing in the processing chamber, a teaching substrate to teach the conveying robot regarding a position of a substrate, and a storage location for storing the teaching substrate.
La présente invention permet d'exécuter l'enseignement sans introduire de substrat d'enseignement depuis l'extérieur d'un dispositif de traitement de substrat. Un dispositif de traitement de substrat selon la présente invention comprend une chambre de traitement, un robot de transport qui transporte un substrat qui est un objet de traitement dans la chambre de traitement, un substrat d'enseignement pour enseigner au robot de transport une position d'un substrat, et un emplacement de stockage pour stocker le substrat d'enseignement.
教示用基板を基板処理装置の外部から導入することなく、教示を実行可能とする。基板処理装置は、処理室と、処理室における処理の対象となる基板を搬送する搬送ロボットと、搬送ロボットに基板の位置を教示するための教示用基板と、教示用基板を格納する格納場所とを備える。 |
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Bibliography: | Application Number: WO2023JP15183 |