SINGLE PHOTON DETECTION ELEMENT, ELECTRONIC DEVICE AND LIDAR DEVICE

• Main Authors: LEE, In Ho, LEE, Myung Jae
• Format: Patent
• Language: English; French; Korean
• Published: 28.12.2023
• Subjects: ANALOGOUS ARRANGEMENTS USING OTHER WAVES; BASIC ELECTRIC ELEMENTS; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES; MEASURING; PHYSICS; RADIO DIRECTION-FINDING; RADIO NAVIGATION; SEMICONDUCTOR DEVICES; TESTING

The single photon detection element comprises: a substrate having a first surface and a second surface, which are arranged to be opposite to each other; and a plurality of plasmonic nano-patterns provided on the second surface, wherein the substrate includes: a highly doped region provided to be adjacent to the first surface; a substrate region provided between the highly doped region and the plurality of plasmonic nano-patterns; and a first well provided between the substrate region and the highly doped region, the first well having a first conductive type, and the highly doped region having a second conductive type that differs from the first conductive type. L'invention concerne un élément de détection de photon unique comprenant : un substrat ayant une première surface et une deuxième surface, qui sont agencées pour être opposées l'une par rapport à l'autre ; et une pluralité de nano-motifs plasmoniques disposés sur la deuxième surface, le substrat comprenant : une région hautement dopée disposée de façon à être adjacente par rapport à la première surface ; une région de substrat disposée entre la région hautement dopée et la pluralité de nano-motifs plasmoniques ; et un premier puits disposé entre la région de substrat et la région fortement dopée, le premier puits ayant un premier type conducteur, et la région hautement dopée ayant un deuxième type conducteur qui diffère du premier type conducteur. 단일 광자 검출 소자는 서로 반대편에 배치되는 제1 면 및 제2 면을 갖는 기판, 및 제2 면 상에 제공되는 복수의 플라즈모닉 나노 패턴들을 포함하되, 기판은, 제1 면에 인접하게 제공되는 고농도 도핑 영역, 고농도 도핑 영역과 복수의 플라즈모닉 나노 패턴들 사이에 제공되는 기판 영역, 및 기판 영역과 고농도 도핑 영역 사이에 제공되는 제1 웰을 포함하되, 제1 웰은 제1 도전형을 갖고, 고농도 도핑 영역은 제1 도전형과 다른 제2 도전형을 갖는다.