DEFECT INSPECTING DEVICE, AND DEFECT INSPECTING METHOD

• Main Authors: SEKI, Takateru, IMAIZUMI, Takamasa, KOBAYASHI, Yasuhiko, FUJIOKA, Takahiro
• Format: Patent
• Language: English; French; Japanese
• Published: 28.12.2023
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Provided are a defect inspecting device and a defect inspecting method with improved inspection determination accuracy. The defect inspecting method comprises an image acquisition step in which the defect inspecting device changes the relative postures of the object for inspection and the imaging un...