COMPOUND, PHOTOSENSITIVE COMPOSITION, AND METHOD FOR FORMING PATTERN

Provided is a compound constituted from a heteropolyacid anion, a photoreactive cation represented by formula (1), and a hydrogen cation. Also provided is a photosensitive composition containing this compound. (In formula (1), R1 and R2 are each independently an optionally substituted linear saturat...

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Bibliographic Details
Main Authors YAMAMOTO, Hiroki, HATTORI, Shigeki
Format Patent
LanguageEnglish
French
Japanese
Published 28.09.2023
Subjects
ACYCLIC OR CARBOCYCLIC COMPOUNDS
APPARATUS SPECIALLY ADAPTED THEREFOR
CHEMISTRY
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
METALLURGY
ORGANIC CHEMISTRY
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:Provided is a compound constituted from a heteropolyacid anion, a photoreactive cation represented by formula (1), and a hydrogen cation. Also provided is a photosensitive composition containing this compound. (In formula (1), R1 and R2 are each independently an optionally substituted linear saturated aliphatic hydrocarbon group having 1-10 carbon atoms, linear unsaturated aliphatic hydrocarbon group having 2-10 carbon atoms or aromatic group having 3-10 carbon atoms. Q is an optionally substituted saturated aliphatic hydrocarbon chain or aromatic chain. G is a substituent group having a monovalent cation.) L'invention concerne un composé constitué d'un anion hétéropolyacide, d'un cation photoréactif représenté par la formule (1), et d'un cation hydrogène. L'invention concerne également une composition photosensible contenant ce composé. (Dans la formule (1), R1 et R2 sont chacun indépendamment un groupe hydrocarboné aliphatique saturé linéaire éventuellement substitué ayant de 1 à 10 atomes de carbone, un groupe hydrocarboné aliphatique insaturé linéaire ayant de 2 à 10 atomes de carbone ou un groupe aromatique ayant de 3 à 10 atomes de carbone. Q est une chaîne hydrocarbonée aliphatique saturée éventuellement substituée ou une chaîne aromatique. G est un groupe substituant ayant un cation monovalent.) ヘテロポリ酸アニオンと、下記式（１）で表される光反応性カチオンと、水素カチオンとで構成される化合物。この化合物を含む感光性組成物。 （上記式（１）において、Ｒ１とＲ２は、それぞれ独立して、置換基を有していても良い、炭素数１～１０の鎖状飽和脂肪族炭化水素基、炭素数２～１０の鎖状不飽和脂肪族炭化水素基又は炭素数３～１０の芳香族基である。Ｑは、置換基を有していても良い、飽和脂肪族炭化水素鎖又は芳香族鎖である。Ｇは１価のカチオンを有する置換基である。）
Bibliography:Application Number: WO2023JP08097