ELECTROSTATIC CHUCK WITH POROUS PLUG
Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceram ic-to-ceramic body. In one example, ceramic porous plug is sintered with the cer...
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| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English French |
| Published |
10.08.2023
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| Subjects | |
| Online Access | Get full text |
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| Abstract | Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceram ic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.
L'invention concerne des mandrins électrostatiques et leur procédé de formation. Les mandrins électrostatiques comprennent un passage de gaz arrière ayant un bouchon poreux en céramique fixé à l'intérieur de celui-ci par un corps en céramique du mandrin avec un corps céramique-céramique. Dans un exemple, un bouchon poreux en céramique est fritté avec le corps en céramique. |
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| AbstractList | Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceram ic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.
L'invention concerne des mandrins électrostatiques et leur procédé de formation. Les mandrins électrostatiques comprennent un passage de gaz arrière ayant un bouchon poreux en céramique fixé à l'intérieur de celui-ci par un corps en céramique du mandrin avec un corps céramique-céramique. Dans un exemple, un bouchon poreux en céramique est fritté avec le corps en céramique. |
| Author | CHADHA, Arvinder KOHZU, Tomoaki |
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| Discipline | Medicine Chemistry Sciences |
| DocumentTitleAlternate | MANDRIN ÉLECTROSTATIQUE À BOUCHON POREUX |
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| Notes | Application Number: WO2023US10342 |
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| Snippet | Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | ELECTROSTATIC CHUCK WITH POROUS PLUG |
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