ELECTROSTATIC CHUCK WITH POROUS PLUG

Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceram ic-to-ceramic body. In one example, ceramic porous plug is sintered with the cer...

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Bibliographic Details
Main Authors KOHZU, Tomoaki, CHADHA, Arvinder
Format Patent
LanguageEnglish
French
Published 10.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceram ic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body. L'invention concerne des mandrins électrostatiques et leur procédé de formation. Les mandrins électrostatiques comprennent un passage de gaz arrière ayant un bouchon poreux en céramique fixé à l'intérieur de celui-ci par un corps en céramique du mandrin avec un corps céramique-céramique. Dans un exemple, un bouchon poreux en céramique est fritté avec le corps en céramique.
Bibliography:Application Number: WO2023US10342