CORRUGATED HIGH-RESOLUTION SHADOW MASKS

• Main Authors: YANG, Jiye, TANG, Ching Wan, DONG, Shoucheng
• Format: Patent
• Language: English; French
• Published: 27.07.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A corrugated shadow mask (100) for patterned vapor deposition includes a corrugated membrane (110) under tensile stress with a plurality of through-apertures (112) forming an aperture array through which a vaporized deposition material can pass. The through-apertures (112) are at the apexes of the corrugation (113) and project from the membrane surface (110a, 110b) surrounding the through-apertures (112). The shadow mask (100) is particularly suited for forming pixel arrays for OLED displays without color mixing from adjacent pixels (321-323). Un masque perforé ondulé (100) pour le dépôt en phase vapeur suivant des motifs comprend une membrane ondulée (110) sous contrainte de traction comportant une pluralité d'ouvertures traversantes (112) formant un réseau d'ouvertures à travers lequel peut passer un matériau de dépôt vaporisé. Les ouvertures traversantes (112) sont situées au niveau des sommets de l'ondulation (113) et font saillie à partir de la surface de membrane (110a, 110b) entourant les ouvertures traversantes (112). Le masque perforé (100) est particulièrement approprié pour former des réseaux de pixels pour des affichages OLED sans mélange des couleurs de pixels adjacents (321-323).