HEATING DEVICE AND EPITAXIAL GROWTH EQUIPMENT

• Main Authors: JIN, Lan, LIU, Tiejun, ZHU, Jinghua
• Format: Patent
• Language: Chinese; English; French
• Published: 06.07.2023
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; BLASTING; CHEMISTRY; CRYSTAL GROWTH; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF; HEATING; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SEMICONDUCTOR DEVICES; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; WEAPONS

A heating device and epitaxial growth equipment. The heating device comprises: a plurality of light bulb assemblies (1), which are arranged at intervals in a circumferential direction for surrounding an object to be heated, each light bulb assembly (1) comprising a light base (11), a filament (12) electrically connected to the light base (11), and a light housing (13) coveringly arranged at the outside of the filament (12) and mounted on the light base (11); and a reflection component (2), which is arranged around the plurality of light bulb assemblies (1) and used for reflecting light emitted by the plurality of light bulb assemblies (1) towards the object to be heated, wherein a reflective layer (F) is provided on an inner surface or an outer surface of each light housing (13) of at least a portion of the plurality of light bulb assemblies (1), each reflective layer (F) being used for reflecting light emitted by a filament (12) towards the object to be heated. The present device implements multiple temperat