VACUUM PUMP WITH REDUCED SEAL REQUIREMENTS

Vacuum pump (10) comprising a substantially hermetically sealed enclosure (40), a core pump assembly located within the enclosure (40), and an inert purge gas inlet (70) fluidly connected to the enclosure (40) for supplying inert purge gas to an interior of the enclosure (40) surrounding the core pu...

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Bibliographic Details
Main Authors SCHOFIELD, Nigel Paul, LONG, Cainan, HOLBROOK, Alan Ernest Kinnaird
Format Patent
LanguageEnglish
French
Published 29.06.2023
Subjects
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Summary:Vacuum pump (10) comprising a substantially hermetically sealed enclosure (40), a core pump assembly located within the enclosure (40), and an inert purge gas inlet (70) fluidly connected to the enclosure (40) for supplying inert purge gas to an interior of the enclosure (40) surrounding the core pump assembly, so as to apply an inert positive pressure to the core pump assembly that reduces leakage of process gas from the core pump assembly such that seals therein, in particular expensive process sensitive elastomer seals, can be removed or reduced. Pompe à vide (10) comprenant une enceinte sensiblement fermée hermétiquement (40), un ensemble pompe centrale situé à l'intérieur de l'enceinte (40), et une entrée (70) de gaz de purge inerte en communication fluidique avec l'enceinte (40) afin d'alimenter en gaz de purge inerte un intérieur de l'enceinte (40) entourant l'ensemble pompe centrale, de façon à appliquer à l'ensemble pompe centrale une pression positive inerte permettant de réduire les fuites de gaz de traitement à partir de l'ensemble pompe centrale, de sorte que des joints d'étanchéité dans ledit ensemble, en particulier des joints élastomères coûteux sensibles aux traitements, peuvent être éliminés ou réduits.
Bibliography:Application Number: WO2022GB53270