GAS SENSOR WITH ZNO NANORODS

The invention is directed to an gas sensor (2) comprising a substrate (4); at least two interdigitated electrodes (6) deposited on the substrate (4); an gas sensing layer (16) comprising ZnO nanorods (16.1) deposited on and between the at least two interdigitated electrodes (6), said gas sensing lay...

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Bibliographic Details
Main Authors BARBORINI, Emanuele, LENOBLE, Damien, CREPELLIERE, Jonathan, MENGUELTI, Kevin, GIROD, Stéphanie
Format Patent
LanguageEnglish
French
Published 29.06.2023
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The invention is directed to an gas sensor (2) comprising a substrate (4); at least two interdigitated electrodes (6) deposited on the substrate (4); an gas sensing layer (16) comprising ZnO nanorods (16.1) deposited on and between the at least two interdigitated electrodes (6), said gas sensing layer (16) showing a resistivity that varies when in contact with ethanol; wherein the ZnO nanorods (16.1) are deposited directly on the at least two interdigitated electrodes (6). L'invention concerne un capteur de gaz (2) comprenant un substrat (4) ; au moins deux électrodes interdigitées (6) déposées sur le substrat (4) ; une couche de détection de gaz (16) comprenant des nanotiges ZnO (16.1) déposées sur les au moins deux électrodes interdigitées (6) et entre ces dernières, ladite couche de détection de gaz (16) présentant une résistivité qui varie au contact de l'éthanol ; les nanotiges de ZnO (16.1) étant déposées directement sur les au moins deux électrodes interdigitées (6).
Bibliography:Application Number: WO2022EP87288