OPTICAL FILTER AND STERILIZATION DEVICE
The present invention provides an optical filter which is capable of effectively transmitting ultraviolet light that has a wavelength of 220 nm to 225 nm, while suppressing transmission of ultraviolet light that has a wavelength of 240 nm to 320 nm. An optical filter 1 according to the present inven...
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Format | Patent |
Language | English French Japanese |
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22.06.2023
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Abstract | The present invention provides an optical filter which is capable of effectively transmitting ultraviolet light that has a wavelength of 220 nm to 225 nm, while suppressing transmission of ultraviolet light that has a wavelength of 240 nm to 320 nm. An optical filter 1 according to the present invention is provided with a transparent base material 2 and a multilayer dielectric film 3 that contains hafnium oxide and is arranged on the transparent base material 2; and if Ic is the diffraction intensity of a diffraction peak of the (1 1 1) crystal plane associated with a cubic hafnium oxide crystal, Im is the diffraction intensity of a diffraction peak of the (-1 1 1) crystal plane associated with a monoclinic hafnium oxide crystal, and Ia is the diffraction intensity of a diffraction peak associated with an amorphous hafnium oxide, the crystallization parameter P obtained by formula (1) is 0.7 or more. (1): P = (2 × Ic + Im)/(Ic + Im + Ia)
La présente invention concerne un filtre optique qui est capable de transmettre efficacement une lumière ultraviolette qui a une longueur d'onde de 220 nm à 225 nm, tout en supprimant la transmission de lumière ultraviolette qui a une longueur d'onde de 240 nm à 320 nm. Un filtre optique 1 selon la présente invention est pourvu d'un matériau de base transparent 2 et d'un film diélectrique multicouche 3 qui contient de l'oxyde d'hafnium et est disposé sur le matériau de base transparent 2 ; et si Ic est l'intensité de diffraction d'un pic de diffraction du plan cristallin (1 1 1) associé à un cristal d'oxyde d'hafnium cubique, Im est l'intensité de diffraction d'un pic de diffraction du plan cristallin (-1 1 1) associé à un cristal d'oxyde d'hafnium monoclinique, et Ia est l'intensité de diffraction d'un pic de diffraction associé à un oxyde d'hafnium amorphe, le paramètre de cristallisation P obtenu par la formule (1) est supérieur ou égal à 0,7. (1) : P = (2 × Ic + Im)/(Ic + Im + Ia)
波長240nm~320nmにおける紫外線の透過を抑制しつつ、波長220nm~225nmにおける紫外線を効果的に透過させることができる、光学フィルタを提供する。 透明基材2と、透明基材2上に設けられており、酸化ハフニウムを含む、誘電体多層膜3とを備え、X線回折測定において、立方晶系酸化ハフニウム結晶に由来する(1 1 1)結晶面による回折ピークの回折強度をIcとし、単斜晶系酸化ハフニウム結晶に由来する(-1 1 1)結晶面による回折ピークの回折強度をImとし、非晶質酸化ハフニウムに由来する回折ピークの回折強度をIaとしたときに、下記式(1)における結晶化パラメータPが、0.7以上である、光学フィルタ1。 P=(2×Ic+Im)/(Ic+Im+Ia)...式(1) |
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AbstractList | The present invention provides an optical filter which is capable of effectively transmitting ultraviolet light that has a wavelength of 220 nm to 225 nm, while suppressing transmission of ultraviolet light that has a wavelength of 240 nm to 320 nm. An optical filter 1 according to the present invention is provided with a transparent base material 2 and a multilayer dielectric film 3 that contains hafnium oxide and is arranged on the transparent base material 2; and if Ic is the diffraction intensity of a diffraction peak of the (1 1 1) crystal plane associated with a cubic hafnium oxide crystal, Im is the diffraction intensity of a diffraction peak of the (-1 1 1) crystal plane associated with a monoclinic hafnium oxide crystal, and Ia is the diffraction intensity of a diffraction peak associated with an amorphous hafnium oxide, the crystallization parameter P obtained by formula (1) is 0.7 or more. (1): P = (2 × Ic + Im)/(Ic + Im + Ia)
La présente invention concerne un filtre optique qui est capable de transmettre efficacement une lumière ultraviolette qui a une longueur d'onde de 220 nm à 225 nm, tout en supprimant la transmission de lumière ultraviolette qui a une longueur d'onde de 240 nm à 320 nm. Un filtre optique 1 selon la présente invention est pourvu d'un matériau de base transparent 2 et d'un film diélectrique multicouche 3 qui contient de l'oxyde d'hafnium et est disposé sur le matériau de base transparent 2 ; et si Ic est l'intensité de diffraction d'un pic de diffraction du plan cristallin (1 1 1) associé à un cristal d'oxyde d'hafnium cubique, Im est l'intensité de diffraction d'un pic de diffraction du plan cristallin (-1 1 1) associé à un cristal d'oxyde d'hafnium monoclinique, et Ia est l'intensité de diffraction d'un pic de diffraction associé à un oxyde d'hafnium amorphe, le paramètre de cristallisation P obtenu par la formule (1) est supérieur ou égal à 0,7. (1) : P = (2 × Ic + Im)/(Ic + Im + Ia)
波長240nm~320nmにおける紫外線の透過を抑制しつつ、波長220nm~225nmにおける紫外線を効果的に透過させることができる、光学フィルタを提供する。 透明基材2と、透明基材2上に設けられており、酸化ハフニウムを含む、誘電体多層膜3とを備え、X線回折測定において、立方晶系酸化ハフニウム結晶に由来する(1 1 1)結晶面による回折ピークの回折強度をIcとし、単斜晶系酸化ハフニウム結晶に由来する(-1 1 1)結晶面による回折ピークの回折強度をImとし、非晶質酸化ハフニウムに由来する回折ピークの回折強度をIaとしたときに、下記式(1)における結晶化パラメータPが、0.7以上である、光学フィルタ1。 P=(2×Ic+Im)/(Ic+Im+Ia)...式(1) |
Author | HIMEI, Yusuke |
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DocumentTitleAlternate | FILTRE OPTIQUE ET DISPOSITIF DE STÉRILISATION 光学フィルタ及び殺菌装置 |
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RelatedCompanies | NIPPON ELECTRIC GLASS CO., LTD |
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Snippet | The present invention provides an optical filter which is capable of effectively transmitting ultraviolet light that has a wavelength of 220 nm to 225 nm,... |
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SubjectTerms | CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, ORSURGICAL ARTICLES DISINFECTION, STERILISATION, OR DEODORISATION OF AIR HUMAN NECESSITIES HYGIENE MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICALARTICLES MEDICAL OR VETERINARY SCIENCE METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS INGENERAL OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS |
Title | OPTICAL FILTER AND STERILIZATION DEVICE |
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