WAFER MANIPULATOR HAVING LOAD-VARIABLE COUNTERFORCE

A wafer manipulator having load counterforce is disclosed. The present invention may be located inside a chamber to set the position of a wafer. Since the present invention fixes a base part, on which a fixing and moving part is disposed, by means of a fixing part, the load may not cause tilting. Th...

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Bibliographic Details
Main Authors HWANG, Young Bok, KIM, Hyo Dong, YU, Kyu Sang, KIM, Wan Sup
Format Patent
LanguageEnglish
French
Korean
Published 20.04.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A wafer manipulator having load counterforce is disclosed. The present invention may be located inside a chamber to set the position of a wafer. Since the present invention fixes a base part, on which a fixing and moving part is disposed, by means of a fixing part, the load may not cause tilting. Therefore, the position of the wafer may be changed about five axes, and the present invention may be manufactured in small size. Un manipulateur de tranche ayant une force antagoniste de charge est divulgué. La présente invention peut être située à l'intérieur d'une chambre pour établir la position d'une tranche. Etant donné que la présente invention fixe une partie de base, sur laquelle une partie de fixation et de déplacement est disposée, au moyen d'une partie de fixation, la charge ne peut pas provoquer d'inclinaison. Par conséquent, la position de la tranche peut être modifiée autour de cinq axes, et la présente invention peut être fabriquée en petite taille. 하중 대항력을 가지는 웨이퍼 매니퓰레이터가 개시된다. 본 발명은 챔버 내 위치되어 웨이퍼의 위치를 설정할 수 있다. 본 발명은 고정부를 통하여 고정이동부가 배치되는 베이스부를 고정하므로, 하중에 의하여서도 처짐이 발생되지 않을 수 있다. 또한, 그러면서 5축으로 웨이퍼의 위치를 변경할 수 있으며, 소형으로 제조될 수도 있다.
Bibliography:Application Number: WO2022KR15250