A 3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH HEAT SPREADER
A semiconductor device, the device including: a first level including a plurality of first transistors, where at least one of the plurality of first transistors includes a single crystal channel; a first interconnect layer disposed on top of the plurality of first transistors; a plurality of ground...
Saved in:
Main Authors | , , |
---|---|
Format | Patent |
Language | English French |
Published |
30.03.2023
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!