SYSTEM AND METHOD FOR THE MULTI-STEP PROCESSING OF PLANAR SUBSTRATES

• Main Authors: WASCHBÜSCH, Michael, PLAPPER, Volker, KUREK, Klaus-Peter, ENGELHARDT, Ulrich
• Format: Patent
• Language: English; French; German
• Published: 23.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING; CLEANING IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONVEYING; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GLASS; HANDLING THIN OR FILAMENTARY MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; METALLURGY; MINERAL OR SLAG WOOL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

Die Erfindung betrifft eine Anlage und ein Verfahren zum mehrschrittigen Verarbeiten flächiger Substrate, insbesondere flächiger Glassubstrate, auf einem Substratträger, wobei mehrere räumlich voneinander getrennte Verarbeitungsstationen durch eine Substratträger- Fördereinrichtung miteinander verbu...