SYSTEM AND METHOD FOR THE MULTI-STEP PROCESSING OF PLANAR SUBSTRATES

• Main Authors: WASCHBÜSCH, Michael, PLAPPER, Volker, KUREK, Klaus-Peter, ENGELHARDT, Ulrich
• Format: Patent
• Language: English; French; German
• Published: 23.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING; CLEANING IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONVEYING; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GLASS; HANDLING THIN OR FILAMENTARY MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; METALLURGY; MINERAL OR SLAG WOOL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

Die Erfindung betrifft eine Anlage und ein Verfahren zum mehrschrittigen Verarbeiten flächiger Substrate, insbesondere flächiger Glassubstrate, auf einem Substratträger, wobei mehrere räumlich voneinander getrennte Verarbeitungsstationen durch eine Substratträger- Fördereinrichtung miteinander verbunden sind und ein Substratträger über die Substratträger-Fördereinrichtung von einer Verarbeitungsstation zur nächsten Verarbeitungsstation befördert wird, um ein auf einem Substratträger aufgelegtes flächiges Substrat nacheinander mehreren Verarbeitungsschritten zu unterziehen. The invention relates to a system and a method for the multi-step processing of planar substrates, more particularly planar glass substrates, on a substrate carrier, wherein a plurality of mutually spatially separated processing stations are interconnected by means of a substrate-carrier conveying device, and wherein a substrate carrier is conveyed from one processing station to the next processing station by means of the substrate-carrier conveying device in order to subject a planar substrate laid on a substrate carrier to a plurality of processing steps in succession. L'invention concerne un système et un procédé pour le traitement en plusieurs étapes de substrats plats, en particulier de substrats de verre plats, sur un support de substrat, une pluralité de station de traitement séparées spatialement les unes des autres étant reliées entre elles au moyen d'un dispositif de transport de support de substrat, et un support de substrat étant transporté d'une station de traitement à la station de traitement suivante au moyen du dispositif de transport de support de substrat afin de soumettre un substrat plat posé sur un support de substrat à une pluralité d'étapes de traitement successives.