METROLOGY SLOT PLATES

• Main Authors: DOERING, Kenneth Brian, SHAH, Vivek B, BALUJA, Sanjeev, AGARWAL, Ashutosh, ZHANG, Chunlei, SAMPATHKUMAR, Shrihari
• Format: Patent
• Language: English; French
• Published: 09.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Metrology slot plates, processing chamber lids and processing chambers having metrology slot plates are described. Each of the metrology slot plates independently comprises one or more of a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser) or an emissometer. L'invention concerne des plaques à fente pour métrologie, des couvercles de chambre de traitement et des chambres de traitement ayant des plaques à fente pour métrologie. Chacune des plaques à fente pour métrologie comprend indépendamment un ou plusieurs éléments parmi une ébauche de plaque, un réflectomètre, un capteur de capacité, un débitmètre de gaz, un manomètre, un pyromètre, un capteur de distance (laser) ou un émissomètre.