SUBMICRON WAVEGUIDE COUPLING STRUCTURE

A submicron waveguide coupling structure, comprising: a silicon optical chip (10), a laser chip (20), and a silicon waveguide (30). The laser chip (20) is arranged upside down in a mounting slot (11) on one surface of the silicon optical chip (10); the laser chip (20) comprises a laser (21), the las...

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Bibliographic Details
Main Authors ZHU, Yu, GAN, Fei, LI, Liang, SHEN, Xiaohan, CHEN, Ben
Format Patent
LanguageChinese
English
French
Published 23.02.2023
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:A submicron waveguide coupling structure, comprising: a silicon optical chip (10), a laser chip (20), and a silicon waveguide (30). The laser chip (20) is arranged upside down in a mounting slot (11) on one surface of the silicon optical chip (10); the laser chip (20) comprises a laser (21), the laser (21) comprising: an indium phosphide substrate (211) and a multi-quantum well structure (212) formed in the indium phosphide substrate (211); a recess (2110) is formed on the upper surface of the indium phosphide substrate (211), and positioning columns (14) matching the recess (2110) are correspondingly provided in the mounting slot (11) of the silicon optical chip (10); a light exit end surface (2111) and a scribing end surface (2112) are formed on an end surface of the indium phosphide substrate (211), the light exit end surface (2111) is formed by means of etching, and a stepped structure is formed by the light exit end surface (2111) and the scribing end surface (2112); the silicon waveguide (30) is located
Bibliography:Application Number: WO2021CN118785