COMPOSITION FOR REMOVING EDGE BEAD OF METAL-CONTAINING RESIST, AND METHOD FOR FORMING PATTERN COMPRISING STEP OF REMOVING EDGE BEAD BY USING SAME

• Main Authors: HEO, Ryunmin, KU, Jamin, KIM, Jaehyun, LEE, Donghyung, HAN, Dasom, MOON, Hyungrang, KIM, Minsoo, LEE, Minyoung
• Format: Patent
• Language: English; French; Korean
• Published: 16.02.2023
• Subjects: ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES; APPARATUS SPECIALLY ADAPTED THEREFOR; CANDLES; CHEMISTRY; CINEMATOGRAPHY; DETERGENT COMPOSITIONS; DETERGENTS; ELECTROGRAPHY; FATTY ACIDS THEREFROM; HOLOGRAPHY; MATERIALS THEREFOR; METALLURGY; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RECOVERY OF GLYCEROL; RESIN SOAPS; SOAP OR SOAP-MAKING; USE OF SINGLE SUBSTANCES AS DETERGENTS

Provided are: a composition for removing an edge bead of a metal-containing resist, comprising an organic solvent and a compound having an AlogP3 of 30 Å2 or more; and a method for forming a pattern, comprising a step of removing an edge bead by using same. L'invention concerne une composition pour éliminer un bourrelet de bord d'une résine contenant du métal, comprenant un solvant organique et un composé comportant un AlogP3 de 30 Å2 ou plus ; et un procédé de formation d'un motif comprenant une étape d'élimination d'un bourrelet de bord au moyen de cette composition. 유기 용매, 그리고 AlogP3가 30 Å2 이상인 화합물을 포함하는, 금속 함유 레지스트의 에지 비드 제거용 조성물, 및 이를 이용한 에지 비드 제거 단계를 포함하는 패턴 형성 방법을 제공한다.