COMPOSITION FOR REMOVING EDGE BEAD FROM METAL-CONTAINING RESISTS, AND METHOD OF FORMING PATTERNS INCLUDING STEP OF REMOVING EDGE BEAD USING SAME

• Main Authors: HEO, Ryunmin, KU, Jamin, KIM, Jaehyun, LEE, Donghyung, HAN, Dasom, MOON, Hyungrang, KIM, Minsoo, LEE, Minyoung
• Format: Patent
• Language: English; French; Korean
• Published: 16.02.2023
• Subjects: ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES; APPARATUS SPECIALLY ADAPTED THEREFOR; CANDLES; CHEMISTRY; CINEMATOGRAPHY; DETERGENT COMPOSITIONS; DETERGENTS; ELECTROGRAPHY; FATTY ACIDS THEREFROM; HOLOGRAPHY; MATERIALS THEREFOR; METALLURGY; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RECOVERY OF GLYCEROL; RESIN SOAPS; SOAP OR SOAP-MAKING; USE OF SINGLE SUBSTANCES AS DETERGENTS

Provided are: a composition for removing edge beads from metal-containing resists, comprising an organic solvent and a compound having an AMW of 7 g/mol or more; and a pattern forming method including an edge bead removing step using same. La présente invention concerne : une composition destinée à l'élimination des cordons de bord de réserves contenant du métal, comprenant un solvant organique et un composé présentant un PMM supérieur ou égal à 7 g/mol ; et un procédé de formation de motifs comprenant une étape d'élimination de cordons de bord à l'aide de ladite composition. 유기 용매, 그리고 AMW가 7 g/mol·개 이상인 화합물을 포함하는, 금속 함유 레지스트의 에지 비드 제거용 조성물, 및 이를 이용한 에지 비드 제거 단계를 포함하는 패턴 형성 방법을 제공한다. 대표도: 도 1