SUBSTRATE PROCESSING APPARATUS
A substrate processing apparatus of the present invention comprises: a drive motor unit; a tilting unit which is rotatably connected to the drive motor unit; a holding unit which is disposed in the tilting unit to hold a sealing ring part; and a connection unit which is connected to the tilting unit...
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| Main Authors | , , |
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| Format | Patent |
| Language | English French Korean |
| Published |
29.12.2022
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A substrate processing apparatus of the present invention comprises: a drive motor unit; a tilting unit which is rotatably connected to the drive motor unit; a holding unit which is disposed in the tilting unit to hold a sealing ring part; and a connection unit which is connected to the tilting unit and the holding unit.
Un appareil de traitement de substrat de la présente invention comprend : une unité de moteur d'entraînement; une unité d'inclinaison qui est reliée de manière rotative à l'unité de moteur d'entraînement; une unité de maintien qui est disposée dans l'unité d'inclinaison pour maintenir une partie de bague d'étanchéité ; et une unité de liaison qui est reliée à l'unité d'inclinaison et à l'unité de maintien.
본 발명의 기판처리장치는 구동모터부와, 구동모터부에 회전 가능하게 연결되는 틸팅유닛과, 틸팅유닛에 배치되고, 밀폐링부를 파지하는 파지유닛과, 틸팅유닛과 파지유닛에 연결되는 연결부를 포함하는 것을 특징으로 한다. |
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| AbstractList | A substrate processing apparatus of the present invention comprises: a drive motor unit; a tilting unit which is rotatably connected to the drive motor unit; a holding unit which is disposed in the tilting unit to hold a sealing ring part; and a connection unit which is connected to the tilting unit and the holding unit.
Un appareil de traitement de substrat de la présente invention comprend : une unité de moteur d'entraînement; une unité d'inclinaison qui est reliée de manière rotative à l'unité de moteur d'entraînement; une unité de maintien qui est disposée dans l'unité d'inclinaison pour maintenir une partie de bague d'étanchéité ; et une unité de liaison qui est reliée à l'unité d'inclinaison et à l'unité de maintien.
본 발명의 기판처리장치는 구동모터부와, 구동모터부에 회전 가능하게 연결되는 틸팅유닛과, 틸팅유닛에 배치되고, 밀폐링부를 파지하는 파지유닛과, 틸팅유닛과 파지유닛에 연결되는 연결부를 포함하는 것을 특징으로 한다. |
| Author | KIM, Bang Hyun PARK, Ji Ho SONG, Ji Hoon |
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| Snippet | A substrate processing apparatus of the present invention comprises: a drive motor unit; a tilting unit which is rotatably connected to the drive motor unit; a... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | SUBSTRATE PROCESSING APPARATUS |
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