SUBSTRATE PROCESSING APPARATUS

A substrate processing apparatus of the present invention comprises: a drive motor unit; a tilting unit which is rotatably connected to the drive motor unit; a holding unit which is disposed in the tilting unit to hold a sealing ring part; and a connection unit which is connected to the tilting unit...

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Bibliographic Details
Main Authors KIM, Bang Hyun, SONG, Ji Hoon, PARK, Ji Ho
Format Patent
LanguageEnglish
French
Korean
Published 29.12.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A substrate processing apparatus of the present invention comprises: a drive motor unit; a tilting unit which is rotatably connected to the drive motor unit; a holding unit which is disposed in the tilting unit to hold a sealing ring part; and a connection unit which is connected to the tilting unit and the holding unit. Un appareil de traitement de substrat de la présente invention comprend : une unité de moteur d'entraînement; une unité d'inclinaison qui est reliée de manière rotative à l'unité de moteur d'entraînement; une unité de maintien qui est disposée dans l'unité d'inclinaison pour maintenir une partie de bague d'étanchéité ; et une unité de liaison qui est reliée à l'unité d'inclinaison et à l'unité de maintien. 본 발명의 기판처리장치는 구동모터부와, 구동모터부에 회전 가능하게 연결되는 틸팅유닛과, 틸팅유닛에 배치되고, 밀폐링부를 파지하는 파지유닛과, 틸팅유닛과 파지유닛에 연결되는 연결부를 포함하는 것을 특징으로 한다.
Bibliography:Application Number: WO2022KR02393