HYBRID GETTERING DIFFUSION PUMP

A vacuum pump includes a liquid getter that is sprayed into a pump chamber. The sprayed liquid getter can chemically bind with gaseous substance in the pump chamber to create ultra-low pressure in the pump chamber and an attached vacuum chamber. The liquefied getter can be circulated and recycled in...

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Bibliographic Details
Main Authors PANCOTTI, Anthon, KIRTLEY, David, PIHL, Christopher James
Format Patent
LanguageEnglish
French
Published 15.12.2022
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:A vacuum pump includes a liquid getter that is sprayed into a pump chamber. The sprayed liquid getter can chemically bind with gaseous substance in the pump chamber to create ultra-low pressure in the pump chamber and an attached vacuum chamber. The liquefied getter can be circulated and recycled in the vacuum pump. Une pompe à vide comprend un getter liquide qui est pulvérisé dans une chambre de pompe. Le getter liquide pulvérisé peut se lier chimiquement à une substance gazeuse dans la chambre de pompe pour créer une pression ultra-basse dans la chambre de pompe et une chambre à vide rattachée à celle-ci. Le getter liquéfié peut être mis en circulation et recyclé dans la pompe à vide.
Bibliography:Application Number: WO2022US33172