INTEGRATED EPITAXY AND PRECLEAN SYSTEM
Embodiments of the present disclosure generally relate to an integrated substrate processing system for cleaning a substrate surface and subsequently performing an epitaxial deposition process thereon. A processing system includes a film formation chamber, a transfer chamber coupled to the film form...
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Main Authors | , , , , , |
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Format | Patent |
Language | English French |
Published |
01.12.2022
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Subjects | |
Online Access | Get full text |
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