METHOD FOR MANUFACTURING FERROELECTRIC-BASED THREE-DIMENSIONAL FLASH MEMORY

• Main Authors: SONG, Yun Heub, CHOI, Chang Hwan, SIM, Jaemin
• Format: Patent
• Language: English; French; Korean
• Published: 13.10.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Disclosed is a method for manufacturing a ferroelectric-based three-dimensional flash memory. In addition, disclosed are a three-dimensional flash memory for improving ferroelectric polarization characteristics and a manufacturing method therefor. To this end, proposed is a method of performing a ra...