METAL ORGANIC CHEMICAL VAPOR DEPOSITION APPARATUS

• Main Authors: CHOI, Sung-Chul, CHO, Kwang-Il
• Format: Patent
• Language: English; French; Korean
• Published: 06.10.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present invention relates to a metal organic chemical vapor deposition apparatus and, more particularly, to a metal organic chemical vapor deposition apparatus in which a coil connection part, through which a coil extension of a heating coil passes, is provided to a chamber and thus a connector for connecting the heating coil for heating a substrate with a feedthrough is disposed outside the chamber, thereby improving the assembling performance and having easy maintenance. La présente invention se rapporte à un appareil de dépôt chimique en phase vapeur par composés organométalliques et, plus particulièrement, à un appareil de dépôt chimique en phase vapeur par composés organométalliques dans lequel une partie de connexion de bobine, à travers laquelle passe une extension d'une bobine chauffante, est disposée sur une chambre, et ainsi un connecteur, permettant de connecter la bobine chauffante afin de chauffer un substrat à l'aide d'une traversée électrique, est disposé à l'extérieur de la chambre, ce qui permet d'améliorer l'efficacité d'assemblage et d'avoir un entretien facile. 본 발명은 유기금속화학기상증착장치에 대한 것으로서, 보다 상세하게는 챔버에 가열코일의 코일연장부가 관통하는 코일연결부를 구비하여 기판을 가열하는 가열코일과 피드쓰루를 연결하는 커넥터를 챔버의 외부에 배치하여 조립성을 향상시키고 유지보수가 용이한 유기금속화학기상증착장치에 대한 것이다.