OPTICAL MEASUREMENT APPARATUS INCLUDING UNIVERSAL METASURFACE, AND OPTICAL MEASUREMENT METHOD USING SAME

• Main Authors: JUNG, Joonkyo, SHIN, Jonghwa, CHANG, Taeyong
• Format: Patent
• Language: English; French; Korean
• Published: 06.10.2022
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; RADIATION PYROMETRY; TESTING

An optical measurement apparatus, according to one aspect of the present invention, comprises: a universal metasurface on which light is incident; a polarizations sensor which measures the polarization state of light passing through the universal metasurface; and a control unit which collects a quantitative differential interference contrast (QDIC) image for x polarization and a QDIC image for y polarization of the incident light collected by the polarization sensor, and a quantitative relative phase (QRP) image indicating the relative phase difference between the x polarization and the y polarization, and calculates the intensity, phase, or polarization information about the incident light. Un appareil de mesure optique, selon un aspect de la présente invention, comprend : une métasurface universelle sur laquelle une lumière est incidente ; un capteur de polarisation qui mesure l'état de polarisation de la lumière traversant la métasurface universelle ; et une unité de commande qui collecte une image de contraste d'interférence différentielle quantitatif (QDIC) pour une polarisation x et une image QDIC pour une polarisation y de la lumière incidente collectée par le capteur de polarisation, et une image de phase relative quantitative (QRP) indiquant la différence de phase relative entre la polarisation x et la polarisation y, et calcule l'intensité, la phase ou les informations de polarisation concernant la lumière incidente. 본 발명의 일 측면에 따른 광학 측정 장치는, 빛이 입사되는 유니버셜 메타 표면; 상기 유니버셜 메타 표면을 통과한 빛의 편광 상태를 측정하는 편광 센서 및 상기 편광 센서를 통해 수집되는 입사광의 x 편광에 대한 QDIC (Quantitative Differential interference contrast) 영상, y 편광에 대한 QDIC 영상 및 상기 x 편광과 y 편광 사이의 상대적인 위상차이를 나타내는 QRP(Quantitative Relative Phase) 영상을 수집하고, 상기 입사광의 세기, 위상 또는 편광 정보를 산출하는 제어부를 포함한다.