SUBSTRATE LIQUID SUPPLY DEVICE

A substrate liquid supply device. The substrate liquid supply device comprises a substrate bottle assembly (1), a substrate liquid delivery assembly (2) and a damping assembly (3), wherein the substrate bottle assembly (1) comprises a plurality of sets of substrate bottles (101), each set of substra...

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Bibliographic Details
Main Authors MIAO, Xinli, DUGUA, Jean-Marc, LIU, Jian
Format Patent
LanguageChinese
English
French
Published 11.08.2022
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A substrate liquid supply device. The substrate liquid supply device comprises a substrate bottle assembly (1), a substrate liquid delivery assembly (2) and a damping assembly (3), wherein the substrate bottle assembly (1) comprises a plurality of sets of substrate bottles (101), each set of substrate bottles (101) comprises a plurality of substrate bottles (101), and bottle caps (102) of each set of substrate bottles (101) are integrally connected by means of a cross beam (103); the substrate liquid delivery assembly (2) comprises a plurality of three-way valves (201) and a substrate liquid delivery pipe (202) connected to the three-way valve (201), each three-way valve (201) comprising two inlets and one outlet; and the damping assembly (3) comprises a linear bearing (301), a guide rod (302) slidably connected to the linear bearing (301), a fixing seat (303) for fixing the linear bearing (301), a spring (304) and a handle (305) arranged on a side surface of the fixing seat (303), a damping block (307) fixed
Bibliography:Application Number: WO2021CN81002