ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, AND DISPLAY PANEL

• Main Authors: CHUNG, Te-Chen, ZHENG, Huilong, WANG, Xingang, TSAI, Chih-cheng
• Format: Patent
• Language: Chinese; English; French
• Published: 16.06.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Disclosed in the present invention are an array substrate, a display panel, and a manufacturing method. The array substrate comprises a substrate; a gate disposed on the substrate; a first insulating layer covering the gate; a first semiconductor layer and a second semiconductor layer that are provided on the first insulating layer, a channel corresponding to the gate being provided on the first semiconductor layer and second semiconductor layer, the second semiconductor layer comprising a first metal oxide semiconductor layer and a second metal oxide semiconductor layer which are stacked, both the first metal oxide semiconductor layer and the second metal oxide semiconductor layer being broken at the channel, and the oxygen vacancy concentration of the second metal oxide semiconductor layer being less than the oxygen vacancy concentration of the first metal oxide semiconductor layer; and a source and a drain that are provided on the second semiconductor layer, both the source and the drain being in electrica