NOZZLE, DEVELOPMENT DEVICE, AND METHOD FOR PROCESSING OBJECT BEING TREATED

According to one embodiment, there is provided a nozzle that sprays an object being treated with a treatment liquid. The nozzle comprises a casing having a central axis, a liquid supply port that supplies the treatment liquid into the casing, an air supply port that supplies compressed air into the...

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Bibliographic Details
Main Authors SHIBUYA Norihito, KANDA Shinji
Format Patent
LanguageEnglish
French
Japanese
Published 02.06.2022
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Summary:According to one embodiment, there is provided a nozzle that sprays an object being treated with a treatment liquid. The nozzle comprises a casing having a central axis, a liquid supply port that supplies the treatment liquid into the casing, an air supply port that supplies compressed air into the casing, and a spray port that sprays the treatment liquid together with the compressed air. The spray port has an annular shape centered on the central axis. Selon un mode de réalisation, l'invention concerne une buse qui pulvérise un objet traité avec un liquide de traitement. La buse comprend un boîtier ayant un axe central, un orifice d'alimentation en liquide qui fournit le liquide de traitement dans le boîtier, un orifice d'alimentation en air qui fournit de l'air comprimé dans le boîtier, et un orifice de pulvérisation qui pulvérise le liquide de traitement conjointement avec l'air comprimé. L'orifice de pulvérisation a une forme annulaire centrée sur l'axe central. 一態様では、被処理体に処理液を噴射するノズルが提供される。このノズルは、中心軸線を有する筐体と、筐体内に処理液を供給する液供給口と、筐体内に圧縮気体を供給する気体供給口と、処理液を圧縮気体と共に噴射する噴射口と、を備え、噴射口は中心軸線を中心とする円環形状を有する。
Bibliography:Application Number: WO2020JP46567