SLURRY AND PREPARATION METHOD FOR HIGH-PERFORMANCE ALUMINUM NITRIDE CERAMIC SUBSTRATE

• Main Authors: DING, Dafei, SHENG, Pengfei, LIN, Lifu, LI, Jianbin, LI, Yehua, WU, Shanghua, LIN, Kunji
• Format: Patent
• Language: Chinese; English; French
• Published: 19.05.2022
• Subjects: ARTIFICIAL STONE; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SLAG; TREATMENT OF NATURAL STONE

Provided are a slurry and preparation method for a high-performance aluminum nitride ceramic substrate. The slurry is made of the following components in parts by mass: 100 parts of aluminum nitride powder, 1-8 parts of a sintering aid, 0.1-4 parts of a sialon particle, 1-6 parts of a dispersant, 38-68 parts of a solvent, 3-12 parts of a binder, and 3-10 parts of a plasticizer. The sintering aid is formed of the following components in parts by mass: 0-8 parts of Y2O3, 0-5 parts of Sm2O3, 0-1 parts of La2O3, and 0.05-3 parts of metal aluminum powder. The solvent is one or more of absolute ethanol, isopropanol, and n-butanol. The sialon particle is dispersed in the slurry system and has a toughening function; the multi-component sintering aid assists in reducing the sintering temperature and promoting sintering densification; the metal aluminum powder can react with oxygen impurities to effectively improve thermal conductivity, and it is conducive to the formation of aluminum nitride in a nitrogen atmosphere,