COUPLER APPLIED TO GAS SUPPLY EQUIPMENT IN SEMICONDUCTOR MANUFACTURING PROCESS

• Main Author: PARK, Young Gil
• Format: Patent
• Language: English; French; Korean
• Published: 21.04.2022
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; JOINTS OR FITTINGS FOR PIPES; LIGHTING; MEANS FOR THERMAL INSULATION IN GENERAL; MECHANICAL ENGINEERING; PIPES; SEMICONDUCTOR DEVICES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; THERMAL INSULATION IN GENERAL; WEAPONS

The present invention relates to a coupler which connects a nipple provided on a cylinder valve of a gas supply line in a semiconductor process to an operating fluid supply line, the coupler comprising: a first inlet port connected to the operating fluid supply line; a housing having a first cavity that is in communication with the first inlet port; at least one ball which is engaged with a ring-shaped engaging recess formed around a connection portion of the nipple; and a pipe portion which is installed in the first cavity and regulates a second cavity in which the connection portion of the nipple is inserted, wherein the pipe portion comprises: a retainer having at least one ball installation path in which the at least one ball is respectively inserted; a switching member which is arranged between the inner circumferential surface of the housing, the inner circumferential surface regulating the first cavity, and the outer circumferential surface of the pipe portion, and which can move between a first position and a second position; and an elastic member which allows the switching member to return to the first position. The at least one ball is moved along the ball installation path in correspondence with the position of the switching member, and can be engaged with or escape from the engaging recess. La présente invention concerne un coupleur qui relie un mamelon disposé sur une soupape de cylindre d'une conduite d'alimentation en gaz dans un procédé pour semi-conducteurs à une conduite d'alimentation en fluide de travail, le coupleur comprenant : un premier orifice d'entrée relié à la conduite d'alimentation en fluide de travail ; un boîtier ayant une première cavité qui est en communication avec le premier orifice d'entrée ; au moins une bille qui est en prise avec un renfoncement de mise en prise en forme d'anneau formé autour d'une partie de raccordement du mamelon ; une partie tuyau qui est installée dans la première cavité et qui régule une seconde cavité dans laquelle la partie de raccordement du mamelon est insérée, la partie tuyau comprenant : un élément de retenue ayant au moins un trajet d'installation de bille dans lequel ladite bille est respectivement insérée ; un élément de commutation qui est disposé entre la surface circonférentielle interne du boîtier, la surface circonférentielle interne régulant la première cavité, et la surface circonférentielle externe de la partie tuyau, et qui peut se déplacer entre une première position et une seconde position ; un élément élastique qui permet à l'élément de commutation de revenir à la première position. Ladite bille est déplacée le long du trajet d'installation de bille en correspondance avec la position de l'élément de commutation et peut être mise en prise avec le renfoncement de mise en prise ou s'échapper de celui-ci. 본 발명은 반도체 공정의 가스 공급 라인의 실린더 밸브에 구비된 니플을 작동 유체 공급라인과 연결하는 커플러에 관한 것으로, 커플러는 작동 유체 공급라인과 연결되는 제 1 유입구와, 제 1 유입구와 연통되는 제 1 중공을 갖는 하우징과, 니플의 연결부 둘레에 형성된 링형의 치합홈과 맞물리는 적어도 하나의 볼과, 제 1 중공 내에 설치되고, 니플의 연결부가 삽입되는 제 2 중공을 규정하는 관부를 구비하고, 관부에는 적어도 하나의 볼이 각각 삽입되는 적어도 하나의 볼 설치로가 형성되는 리테이너와, 제 1 중공을 규정하는 하우징의 내주면과 관부의 외주면 사이에 배치되고 제 1 위치와 제 2 위치 사이를 이동 가능한 스위칭부재와, 스위칭부재를 제 1 위치로 복귀시키는 탄성부재를 포함하고, 적어도 하나의 볼은, 스위칭부재의 위치에 대응하여 볼 설치로를 따라 이동되며, 치합홈과 맞물리거나 치합홈으로부터 이탈 가능하다.