METHOD OF MOUNTING WIRES TO SUBSTRATE SUPPORT CERAMIC

• Main Authors: MIKHNENKO, Oleksandr, CHAU, Quan
• Format: Patent
• Language: English; French
• Published: 20.01.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A substrate support assembly includes a baseplate, a ceramic plate arranged on the baseplate, and a plurality of wires. The ceramic plate includes a plurality of slots arranged on a side facing the baseplate and a plurality of electrically conducting terminals disposed in the plurality of slots, respectively. Each of the terminals includes a base portion connected to the ceramic plate, a second portion extending from the base portion towards the baseplate, and an opening in the second portion extending from an end of the second portion adjacent to the base portion to a distal end of the second portion. Each of the wires passes through the opening of the respective terminal and is braided around the distal end of the second portion of the respective terminal. Un ensemble de support de substrat comprend une plaque de base, une plaque céramique disposée sur la plaque de base et plusieurs fils. La plaque céramique comprend plusieurs fentes disposées sur un côté faisant face à la plaque de base et plusieurs bornes électroconductrices disposées dans les multiples fentes, respectivement. Chacune des bornes comprend une partie base reliée à la plaque céramique, une seconde partie s'étendant à partir de la partie base vers la plaque de base, et une ouverture dans la seconde partie s'étendant d'une extrémité de la seconde partie adjacente à la partie base à une extrémité distale de la seconde partie. Chacun des fils passe à travers l'ouverture de la borne respective et est tressé autour de l'extrémité distale de la seconde partie de la borne respective.