SUBSTRATE HANDLING SYSTEMS

An apparatus for transferring a substrate is disclosed herein. More specifically, the apparatus relates to substrate handling systems used in semiconductor device manufacturing, and more particularly, to substrate handling systems having a substrate handler with enclosed moving elements and increase...

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Bibliographic Details
Main Authors JAGANATHAN, Balasubramaniam Coimbatore, HOEY, Gee Sun, RANGARAJAN, Jagan
Format Patent
LanguageEnglish
French
Published 13.01.2022
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:An apparatus for transferring a substrate is disclosed herein. More specifically, the apparatus relates to substrate handling systems used in semiconductor device manufacturing, and more particularly, to substrate handling systems having a substrate handler with enclosed moving elements and increased compatibility with post-CMP cleaning modules. The apparatus includes one or more indexing assemblies. Each of the indexing assemblies including an enclosure, an actuator assembly disposed within the enclosure, and two handling blades disposed outside of the disclosure. Each of the two blades are moveable in either of a translational or a rotating manner. L'invention concerne un appareil pour le transfert d'un substrat. Plus spécifiquement, l'appareil concerne des systèmes de manipulation de substrat utilisés dans la fabrication de dispositifs à semi-conducteurs, et plus particulièrement, des systèmes de manipulation de substrat ayant un manipulateur de substrat avec des éléments mobiles enfermés et une compatibilité accrue avec les modules de nettoyage post-CMP. L'appareil comprend un ou plusieurs ensembles d'indexation. Chacun des ensembles d'indexation comprend une enceinte, un ensemble actionneur disposé à l'intérieur de l'enceinte, et deux lames de manipulation disposées à l'extérieur de l'enceinte. Chacune des deux lames est mobile soit en translation, soit en rotation.
Bibliography:Application Number: WO2021US26895