POLISHING CARRIER HEAD WITH PIEZOELECTRIC PRESSURE CONTROL

A carrier head for holding a substrate in a polishing system has a housing including a carrier plate, a first flexible membrane secured to the housing, and a plurality of independently operable piezoelectric actuators secured to the carrier plate. The first flexible membrane has an upper surface and...

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Bibliographic Details
Main Authors WONG, Justin Ho Kuen, BROWN, Brian J, NAGENGAST, Andrew J
Format Patent
LanguageEnglish
French
Published 30.12.2021
Subjects
BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:A carrier head for holding a substrate in a polishing system has a housing including a carrier plate, a first flexible membrane secured to the housing, and a plurality of independently operable piezoelectric actuators secured to the carrier plate. The first flexible membrane has an upper surface and having a lower surface that provides a substrate mounting surface. The piezoelectric actuators are positioned above the first flexible membrane so as to independently adjust compressive pressure on the upper surface of the first flexible membrane. La présente invention concerne une tête de support pour maintenir un substrat dans un système de polissage qui comporte un boîtier comprenant une plaque de support, une première membrane flexible fixée au boîtier, et une pluralité d'actionneurs piézoélectriques actionnables indépendamment fixés à la plaque de support. La première membrane flexible comporte une surface supérieure et ayant une surface inférieure qui fournit une surface de montage de substrat. Les actionneurs piézoélectriques sont positionnés au-dessus de la première membrane flexible de façon à ajuster indépendamment une pression de compression sur la surface supérieure de la première membrane flexible.
Bibliography:Application Number: WO2021US38537