PIEZOELECTRIC DEVICE

• Main Authors: IKEUCHI, Shinsuke, CHATANI, Munehito
• Format: Patent
• Language: English; French; Japanese
• Published: 23.12.2021
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

A layered part (120) includes, at least above a recess (113), a first single crystal piezoelectric layer (130), a second single crystal piezoelectric layer (140), an intermediate electrode layer (150), a lower electrode layer (160), and an upper electrode layer (170). The first single crystal piezoe...