THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREFOR

• Main Author: ZHENG, Libin
• Format: Patent
• Language: Chinese; English; French
• Published: 12.08.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Disclosed in the present invention are a thin film transistor array panel and a manufacturing method therefor. The method comprises: forming a device plate, and sequentially stacking a substrate, a gate electrode, a gate insulating layer, an active layer, and a metal layer on the device plate; forming a photoresist layer on the metal layer, wherein the photoresist layer comprises a first portion of the photoresist layer and a second portion of the photoresist layer; using a combination of a mask plate and a laser beam to treat the first portion of the photoresist layer, so as to remove the first portion of the photoresist layer; treating the metal layer to form a source electrode pattern, a drain electrode pattern, and a channel region; and stripping the second portion of the photoresist layer. La présente invention concerne un panneau matriciel de transistors à couches minces et un procédé de fabrication associé. Le procédé comprend : la formation d'une plaque de dispositif, et l'empilage séquentiel d'un sub