DEPOSITION COMPOSITIONS AND METHODS OF MAKING AND USING SAME
A deposition composition includes a solvent comprising a hydrofluorothioether compound represented by the following general formula (I): Rf-S-Rh where Rf is a fluorinated or perfluorinated group having 2-9 carbon atoms and optionally includes one or more catenated heteroatoms or chlorine atoms, and...
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Main Authors | , , , , , |
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Format | Patent |
Language | English French |
Published |
05.08.2021
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Subjects | |
Online Access | Get full text |
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