CARBON NANOTUBE ELECTROSTATIC CHUCK

A platen having improved thermal conductivity and reduced friction is disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivity, thus improving the transfer of heat between the platen and the...

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Bibliographic Details
Main Authors ANELLA, Steven M, SUN, Dawei, CHEN, Qin, CHIPMAN, David J, SERISKY, Ron, BLAKE, Julian G
Format Patent
LanguageEnglish
French
Published 29.07.2021
Subjects
BASIC ELECTRIC ELEMENTS
CHEMISTRY
COMPOUNDS THEREOF
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
SEMICONDUCTOR DEVICES
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Summary:A platen having improved thermal conductivity and reduced friction is disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivity, thus improving the transfer of heat between the platen and the workpiece. Furthermore, the friction between the carbon nanotubes and the workpiece is much lower than that with conventional embossments, reducing particle generation. In another embodiment, a support plate is disposed on the platen, wherein the carbon nanotubes are disposed on the top surface of the support plate. L'invention concerne un plateau ayant une conductivité thermique améliorée et un frottement réduit. Dans un mode de réalisation, des nanotubes de carbone alignés verticalement sont mis en croissance sur la surface supérieure du plateau. Les nanotubes de carbone ont une excellente conductivité thermique, améliorant ainsi le transfert de chaleur entre le plateau et la pièce à travailler. En outre, le frottement entre les nanotubes de carbone et la pièce à travailler est très inférieur à celui des bossages classiques, réduisant la génération de particules. Dans un autre mode de réalisation, une plaque de support est disposée sur le plateau, les nanotubes de carbone étant disposés sur la surface supérieure de la plaque de support.
Bibliography:Application Number: WO2020US66348