LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGING A TRAJECTORY OF PARTICULATE DEBRIS

An apparatus comprising: a radiation receiving apparatus provided with an opening operable to receive radiation from a radiation source through the opening; wherein the radiation receiving apparatus comprises a deflection apparatus arranged to change a trajectory of a particle through the opening ar...

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Main Authors BANINE, Vadim, NIKIPELOV, Andrey, DE VRIES, Sjoerd, HUANG, Yang-Shan, TE SLIGTE, Edwin, VAN DE KERKHOF, Marcus, NENCHEV, Georgi, UMSTADTER, Karl, UZGÖREN, Eray, BAL, Kursat, YAGHOOBI, Parham, RAASVELD, Thomas, HUANG, Zhuangxiong, BRULS, Richard, JACOBS, Johannes, ALBRIGHT, Ronald, MOORS, Johannes, FRIJNS, Olav, RANJAN, Manish
Format Patent
LanguageEnglish
French
Published 29.07.2021
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
X-RAY TECHNIQUE
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Summary:An apparatus comprising: a radiation receiving apparatus provided with an opening operable to receive radiation from a radiation source through the opening; wherein the radiation receiving apparatus comprises a deflection apparatus arranged to change a trajectory of a particle through the opening arriving at the radiation receiving apparatus. Appareil comprenant : un appareil de réception de rayonnement pourvu d'une ouverture permettant de recevoir un rayonnement provenant d'une source de rayonnement à travers l'ouverture; l'appareil de réception de rayonnement comprenant un appareil de déviation agencé pour modifier une trajectoire d'une particule arrivant au niveau de l'appareil de réception de rayonnement, à travers l'ouverture.
Bibliography:Application Number: WO2020EP87889