INSPECTION DEVICE AND INSPECTION METHOD FOR SHEET LAYER

• Main Authors: ISHIDA, Yusaku, HANAWA, Yuki, KOYAMA, Masataka, KOJIMA, Shogo, KINOSHITA, Tomohiro, NAKAGAMI, Motohiro, SUZUKI, Hiroharu
• Format: Patent
• Language: English; French; Japanese
• Published: 01.07.2021
• Subjects: GYROSCOPIC INSTRUMENTS; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING DISTANCES, LEVELS OR BEARINGS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

This inspection device (1) comprises: a scanning device (S); a first recognition unit (54); and a second recognition unit (55). The scanning device (S) is equipped with a laser sensor (3) which emits laser slit light (3R) for measuring a two-dimensional shape, and a moving mechanism (2A) for moving...